LIQUID TREATMENT APPARATUS, LIQUID TREATMENT METHOD AND STORAGEMEDIUM

摘要

A liquid treatment apparatus (10) comprises a hollow holding plate (1) for holding an article (W) to be treated, a hollow outer rotating shaft (2) fixedly coupled with the holding plate (1), a rotary drive section (3) for rotary driving the outer rotating shaft (2), and a lift pin plate (20) arranged in the cavity of the holding plate (1) and having a lift pin (21) for supporting the article (W) to be treated. A cleaning liquid supply section (25) for supplying the cleaning liquid extends in the lift pin plate (20). An elevating/lowering member (16) for arranging the lift pin plate (20) at an upper position a lower position is coupled with the lift pin plate (20). When the lift pin plate (20) is arranged at the lower position, the lift pin plate (20) is rotary driven by receiving the force of the rotary drive section (3) rotary driving the outer rotating shaft (2).