| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a micro fluid device capable of efficiently and stably supplying a fluid to a reaction field of a wide range by as minute an amount as possible, and of efficiently and stably exhausting a reaction product generated from the reaction field of a wide range. <P>SOLUTION: The micro fluid device is equipped with a flow passage plate 10 having flow passage grooves 11, 12, a diffusion member 20 which is arranged opposed to the flow passage plate 10, and in which a supplying material supplied from the flow passage groove 11 is diffused, and a supply suppressing member 50 interposed between the flow passage plate 10 and the diffusion member 20. The flow passage grooves 11, 12 form a flow passage 11A to supply the supply material to the diffusion member 20, and the flow passage 12A to exhaust an exhaust material from the diffusion member 20. The flow passages 11A, 12A are separated from each other, and the supply suppressing member 50 has a first member 51 to suppress diffusion of the supply material and the exhaust material in plane direction of the supply suppressing member 50 in a part opposed to a non-flow passage region in the main surface in which the flow passage grooves 11, 12 of the flow passage plate 10 are formed. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
