| 摘要 |
PROBLEM TO BE SOLVED: To provide a method, an apparatus and a program storage medium to integrally present recipe progress status information further, and more specifically, in a process control system. SOLUTION: This method includes displaying a user interface screen, associated with a recipe including a plurality of process phases executed in the process control system. A plurality of process stage progress indicators are displayed on the user interface screen in an arrangement, indicating representative method of a process flow of the recipe. Each of the process stage progress indicator is representative of at least one of the process phases of the recipe. First one among the process stage progress indicators indicates at least one progress from among the process phases. The first process stage progress indicator is updated in substantially real-time, based on information received from the process control system. COPYRIGHT: (C)2009,JPO&INPIT |
