| 摘要 |
PROBLEM TO BE SOLVED: To provide, at a low cost, a device for resist film formation replacing an expensive resist coater device. SOLUTION: In the inkjet coating device for forming the thin film of resist on a substrate, resist liquid is used as ink. The device includes a stage driving system which drives a stage mounted with the substrate and a control unit which separately controls an inkjet coating control system for inkjet coating. For example, a dxf file format (1) is employed and passed to a DXF data conversion module 2-1 in a converter 2 to convert a coating shape into a bit map file. Bit map file data 3 for IJ generated thereby are transferred to an IJ device 4. COPYRIGHT: (C)2009,JPO&INPIT
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