发明名称 PHOTOSENSITIVE POLYIMIDE COMPOSITION AND POLYIMIDE PRECURSOR COMPOSITION
摘要 There is provided a photosensitive composition including a polyimide or polyimide precursor. The polyimide and polyimide precursor of the present invention includes a group of a first acid-cleavable group, a first base-cleavable group or a first thermally-cleavable group, and another group of a hydrophilic group, or a protected hydrophilic group by a second acid-cleavable group, a second base-cleavable group, or a crosslinkable group.
申请公布号 US2009176172(A1) 申请公布日期 2009.07.09
申请号 US20080278349 申请日期 2008.08.05
申请人 CENTRAL GLASS CO., LTD.;GEORGIA TECH RESEARCH CORPORATION 发明人 YAMANAKA KAZUHIRO;ROMEO MICHAEL;HENDERSON CLIFFORD;MAEDA KAZUHIKO
分类号 G03F7/039 主分类号 G03F7/039
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