发明名称 PATTERN PLATING FILM AND METHOD FOR FORMING PATTERN PLATING FILM
摘要 PROBLEM TO BE SOLVED: To provide a pattern plating film which covers a pattern of a conductor made from aluminum or copper formed on a printed circuit board or a wafer, and to provide a method for forming the pattern plating film. SOLUTION: The pattern plating film 9 is formed on the pattern 3 of the conductor made from copper or aluminum formed on the printed circuit board or the wafer 1, and comprises an electroless-plated film 5 of nickel and an electroless-plated film 7 of a gold-palladium alloy, which have been sequentially formed on the pattern 3 of the conductor. The thickness of the plated film of nickel is preferably 1 to 20μm, and the thickness of the plated film of the gold-palladium alloy is preferably 0.01μm or more. For the plating of the gold-palladium alloy, an electroless plating solution of the gold-palladium alloy is used, which includes a soluble aurate, a soluble palladium salt, a water-soluble amine salt, a carboxylate and a reducing agent. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009149958(A) 申请公布日期 2009.07.09
申请号 JP20070330492 申请日期 2007.12.21
申请人 NE CHEMCAT CORP 发明人 SHIOKAWA KAZUHIKO
分类号 C23C18/52;C23C18/16;C23C18/44;H01L21/28;H01L21/288;H01L21/3205;H01L23/52;H05K3/24 主分类号 C23C18/52
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