TiO2-CONTAINING SILICA GLASS

摘要

The present invention is to provide a TiO2-SiO2 glass having suitable thermal expansion properties as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/°C, falling within the range of 23 } 4 °C and a temperature width, in which a coefficient of thermal expansion is 0 } 5 ppb/°C, of 5 °C or more.