发明名称 METHOD FOR MANUFACTURING THIN FILM TRANSISTOR AND ORGANIC LIGHT EMITTING DEVICE DISPLAY HAVING THIN FILM TRANSISTOR MANUFACTURED BY THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an active matrix organic light emitting device display preventing light emitting unevenness of a stripe shape and lowering of production yield, caused by electric current driving or the like, by forming a driving thin film transistor for an organic light emitting device by a standard laser technology. SOLUTION: Poly-silicon layers 34 and 36 of an active portion of a non-driving thin film transistor (including an outside electric circuit thin film transistor and a switch thin film transistor) of an organic light emitting device are formed by using a standard laser crystallization method. A poly-silicon layer 52 of an active portion of a driving thin film transistor for an organic light emitting device is formed by using a non-laser crystallization method or a low energy laser crystallization method. Therefore, the outside electric circuit thin film transistor and the switch thin film transistor have excellent electrical performance. For example, a high carrier mobility is obtained. Since the driving thin film transistor has good stability so that the resultant display obtains improved luminance uniformity. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009152584(A) 申请公布日期 2009.07.09
申请号 JP20080310170 申请日期 2008.12.04
申请人 TPO DISPLAYS CORP 发明人 WAN TE-CHANG;LIU YU-CHUNG;LEE TE-YU
分类号 H01L29/786;G02F1/1368;H01L21/336;H01L51/50 主分类号 H01L29/786
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