| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive inspection device of an workpiece capable of inspecting each substrate having various sizes. SOLUTION: In a substrate inspection system 10, a first line sensor unit 50 has the first X-ray line sensor 16 and a second X-ray line sensor 18 arranged so that the first scanning line 16a and the second scanning line 18a are arranged on one straight line. The second line sensor unit 52 has a third X-ray line sensor 20 and a fourth X-ray line sensor 22 arranged so that the third scanning line 20a and the fourth scanning line 22a are arranged on one straight line. The third X-ray line sensor 20 images complementarily a transmission image of a substrate 2 on an image-unpickable domain 2a existing between the first scanning line 16a of the first X-ray line sensor 16 and the second scanning line 18a of the second X-ray line sensor 18. COPYRIGHT: (C)2009,JPO&INPIT
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