发明名称 METHOD OF FORMING A CORONA ELECTRODE SUBSTANTIALLY OF CHEMICAL VAPOR DEPOSITION SILICON CARBIDE AND A METHOD OF IONIZING GAS USING THE SAME
摘要 A method is provided for forming a corona-producing emitter electrode by depositing substantially pure silicon carbide by CVD and forming a corona-producing emitter electrode with the deposited silicon carbide. In addition, a method of forming a corona-producing gas ionizer is provided by providing a corona electrode formed from CVD silicon carbide, electrically coupling the corona electrode to a high voltage power supply, and providing an AC or DC voltage from the high voltage power supply to the corona electrode. Furthermore, a method of ionizing gas in an environment is provided by providing a corona-producing ionizer emitter electrode formed substantially of CVD silicon carbide, electrically coupling the electrode to a high voltage power supply, and providing an AC or DC voltage from the high voltage power supply to the electrode.
申请公布号 US2009176431(A1) 申请公布日期 2009.07.09
申请号 US20090393760 申请日期 2009.02.26
申请人 ILLINOIS TOOL WORKS INC. 发明人 CURTIS JAMES R.;GORCZYCA JOHN A.
分类号 H01J9/02 主分类号 H01J9/02
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