发明名称 |
METHOD AND APPARATUS FOR FORMING TRANSPARENT CONDUCTIVE FILM |
摘要 |
Disclosed is a method for forming a transparent conductive film, wherein a zinc oxide-based transparent conductive film is formed on a substrate by sputtering using a target containing a zinc oxide material. The sputtering is performed in a reactive gas atmosphere containing two or three members selected from the group consisting of a hydrogen gas, an oxygen gas and water vapor. |
申请公布号 |
WO2009084441(A1) |
申请公布日期 |
2009.07.09 |
申请号 |
WO2008JP73002 |
申请日期 |
2008.12.17 |
申请人 |
ULVAC, INC.;TAKAHASHI, HIROHISA;ISHIBASHI, SATORU |
发明人 |
TAKAHASHI, HIROHISA;ISHIBASHI, SATORU |
分类号 |
C23C14/08;C23C14/34;C23C14/35;H01B13/00 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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