CONTROLLER FOR POSITIONING DEVICE, METHOD FOR CONTROLLING POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS EQUIPPED WITH POSITIONING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a variable gain controller lower in sensitivity of noise amplification.

SOLUTION: A controller for positioning device is constructed and arranged to: receive a position signal indicative of a position of a positioning device; compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal; selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal; and generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.

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