发明名称 |
POROUS METAL THIN FILM, METHOD FOR MANUFACTURING THE SAME, AND CAPACITOR |
摘要 |
A porous metal thin film formed from aluminum has a film structure in which domains having an average diameter of 200 nm or more, and 500 nm or less and being formed through aggregation of a plurality of grains having an average grain diameter of 50 nm or more, and 160 nm or less are distributed discretely at an average distance of 5 nm or more, and 40 nm or less, wherein the area occupied by the above-described domains is 60% or more, and 90% or less in a cross-section in any direction of the porous metal thin film.
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申请公布号 |
US2009174987(A1) |
申请公布日期 |
2009.07.09 |
申请号 |
US20080330066 |
申请日期 |
2008.12.08 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) |
发明人 |
MIZUNO MASAO |
分类号 |
H01G9/045;B05D5/12;B32B3/10 |
主分类号 |
H01G9/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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