METHOD FOR FABRICATING MICRO-LENS

摘要

Provided is a method of fabricating a micro-lens, including preparing a substrate having a step on top, forming a protection layer on the entire top surface of the substrate having the step, etching the entire surface of the protection layer to form a micro-lens having a radius of curvature on a top surface of the step, and etching the entire surface of the substrate having the micro-lens for the top surface of the step to be formed in a lens shape. Thus, the micro-lens can be integrated with a photoelectronic device in a self-aligned structure, and an additional process for forming the micro-lens is not necessary, so that the photoelectronic device in which the micro-lens is integrated can be fabricated more economically.