PROCESS AND APPARATUS FOR PRODUCING FLUORINATED GASEOUS COMPOUND

摘要

An apparatus for producing a fluorinated gaseous compound. The apparatus includes a circulation system which comprises: a reaction zone in which a liquid mixture containing a raw-material liquid is reacted with a raw-material gas; a flow zone in which only the liquid mixture flows; an upper transfer zone in which the liquid mixture which has undergone the reaction is transferred from an upper part of the reaction zone to an upper part of the flow zone; and a lower transfer zone in which the liquid mixture is transferred from a lower part of the flow zone to a lower part of the reaction zone. (A) The raw-material gas is introduced into the lower part of the reaction zone, and (B) at least one fluorinated gaseous compound selected between a first fluorinated gaseous compound which is a reaction product yielded in the reaction zone and a second fluorinated gaseous compound obtained by further fluorinating the first fluorinated gaseous compound is introduced into the lower part of the reaction zone. The liquid mixture is circulated by these operations (A) and (B).