| 摘要 |
<p>The present invention relates to a complex function micrometer using an I/Q interferometer. The complex function micrometer includes an I/Q interferometer converting a probe beam which includes information with respect to a sample to I signal and Q signal and outputting the signals, a sample die on which the sample is disposed, an XY scanner, a scanner driver, a up/down lift, a micro-distance adjusting device, a focusing/collimating device, and a computer. The computer transfers a movement control signal for controlling the movement of the XY scanner to the scanner driver or transfers a signal for controlling the movement of the up/down lift to the micro-distance adjusting device, and receives the I signal and Q signal provided from the I/Q interferometer to extract information with respect to the surface or inside of the sample. The complex function micrometer performs a multilayer scanning or a constant phase scanning with respect to the sample to obtain information with respect to structure of surface or inside of the sample.</p> |
