| 摘要 |
<p>A micro optical bench structure and a method of manufacturing a micro optical bench structure are provided. The micro optical bench structure including: a lower substrate (40); an upper substrate (44) which is bonded to the lower substrate, and has a through-hole (h) for exposing the lower substrate; and a first optical device which is installed at the lower substrate, and units relating to the first optical device.</p> |
