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发明名称
AUTOMATED PROCESS AND APPARATUS FOR PLANARIZATION OF TOPOGRAPHICAL SURFACES
摘要
申请公布号
EP1644965(A4)
申请公布日期
2009.07.08
申请号
EP20040778118
申请日期
2004.07.09
申请人
BREWER SCIENCE, INC.
发明人
MCCUTCHEON, JEREMY, W.
分类号
B05D3/02;B05C11/02;B05D3/12;B30B5/02;B30B15/06;H01L;H01L21/3105
主分类号
B05D3/02
代理机构
代理人
主权项
地址
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