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发明名称
GROUP III NITRIDE SEMICONDUCTOR DEVICE AND EPITAXIAL SUBSTRATE
摘要
申请公布号
EP1746641(A4)
申请公布日期
2009.07.08
申请号
EP20060715178
申请日期
2006.03.03
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
TANABE, TATSUYA;KIYAMA, MAKOTO;MIURA, KOUHEI;SAKURADA, TAKASHI
分类号
H01L21/338;H01L21/205;H01L29/778;H01L29/812
主分类号
H01L21/338
代理机构
代理人
主权项
地址
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