CAPACITIVE PRESSURE SENSOR

摘要

A capacitive pressure sensor (1) provided with a capacitance detecting section formed at least partially in an opposing region within a capacity chamber comprising a diaphragm, i. e. a pressure sensitive capacitance detecting section (101) formed in a region high in sensitivity to the pressure of the diaphragm and a reference capacitance detecting section (102) formed in a region low in sensitivity to the pressure of the diaphragm, in which the entire size is reduced and excellent reliability is ensured by detecting the signal output value at the reference capacitance detecting section (102) independently.