发明名称 Capacitive sensor and a method for manufacturing the capacitive sensor
摘要 The present invention relates to measuring devices for use in physical measuring, and in particular to capacitive sensors. In the sensor according to the invention, the shape of the stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. Through the invention, a method for manufacturing a capacitive sensor with improved linearity is achieved, as well as a capacitive sensor suitable for use particularly in small capacitive sensor solutions.
申请公布号 US7555950(B2) 申请公布日期 2009.07.07
申请号 US20050232922 申请日期 2005.09.23
申请人 VTI TECHNOLOGIES OY 发明人 RUOHIO JAAKKO;MUTIKAINEN RISTO
分类号 G01P15/125;G01L;G01L9/00;G01P15/08 主分类号 G01P15/125
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