发明名称 |
Substrates and methods for fabricating the same |
摘要 |
An embodiment of the invention provides a substrate. The substrate comprises a single crystal substrate. An epitaxial buffer film is on the single crystal substrate. An epitaxial ZnGa2O4 is on the epitaxial buffer film.
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申请公布号 |
US7557374(B2) |
申请公布日期 |
2009.07.07 |
申请号 |
US20070627219 |
申请日期 |
2007.01.25 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
LIN YAN-RU;TSAI SONG-YEU |
分类号 |
H01L29/04 |
主分类号 |
H01L29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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