发明名称 |
Ion sources and methods for generating an ion beam with a controllable ion current density distribution |
摘要 |
Ion sources and methods for generating an ion beam with a controllable ion current density distribution. The ion source includes a discharge chamber and an electromagnet adapted to generate a magnetic field for changing a density distribution of the plasma inside the discharge chamber and, thereby, to change the ion current density distribution.
|
申请公布号 |
US7557362(B2) |
申请公布日期 |
2009.07.07 |
申请号 |
US20070678979 |
申请日期 |
2007.02.26 |
申请人 |
VEECO INSTRUMENTS INC. |
发明人 |
YEVTUKHOV RUSTAM;HAYES ALAN V.;KANAROV VIKTOR;DRUZ BORIS L. |
分类号 |
H01J49/10;H01J1/50;H01J37/08 |
主分类号 |
H01J49/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|