PROBE AND METHOD FOR FABRICATING THE SAME

摘要

A probe and a method for fabricating the same is provided to minimize stress applied to a probe structure in a planarization process by using a sacrificing layer made of metal. A probe apparatus is classified into a plurality of unit probe patterns, and each unit probe pattern is formed by a unit process. A unit probe pattern mask is formed on the space transformer(100) for the unit process, and the unit probe pattern(102a) is formed on the domain exposed by the unit probe pattern mask. The unit probe pattern mask is removed, and the sacrificial layer(104) of the metal material is formed on the whole of the result. The unit probe pattern and sacrificial layer are planarized, and the upper side of the unit probe pattern is exposed.