| 摘要 |
A method of fabricating a monolithic microwave integrated circuit (MMIC) with one or more coupling transmission structures protruding from the MMIC includes providing a support substrate, providing a wafer containing a face side, a back side, and a plurality of individual MMICs disposed on the face side, and providing a material for holding the wafer on the support substrate. The method further includes applying the material and placing the wafer on to the support substrate so as the face side is disposed on the support substrate and the material is disposed between the face side and the support substrate. In addition, the method includes performing a disjoin process wherein the plurality of individual MMICs are disjoined from the wafer with the one or more coupling transmission structures protruding from the plurality of individual MMICs, the one or more coupling transmission structures being supported by at least a portion of the face side of the wafer. The method further includes removing the material holding the wafer on the support substrate.
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