| 发明名称 |
METHOD OF FABRICATION OF ELECTRONIC DEVICES USING MICROFLUIDIC CHANNELS |
| 摘要 |
A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been foun d to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.
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| 申请公布号 |
CA2449632(C) |
申请公布日期 |
2009.07.07 |
| 申请号 |
CA20032449632 |
申请日期 |
2003.11.17 |
| 申请人 |
PALO ALTO RESEARCH CENTER, INCORPORATED |
发明人 |
CHABINYC, MICHAEL L.;WONG, WILLIAM S.;STREET, ROBERT A.;PAUL, KATERI E. |
| 分类号 |
G03F7/20;H01L27/01;H01L21/336;H01L21/77;H01L27/15;H01L27/28;H01L29/786;H01L33/00;H01L51/00;H01L51/05;H01L51/40 |
主分类号 |
G03F7/20 |
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