METHOD OF MANUFACTURING ABRASIVE PARTICLES, CHEMICAL MECHANICAL POLISHING SLURRY AND METHOD OF MANUFACTURING THE SAME

摘要

A method for manufacturing abrasive particles is provided to uniformly transfer heat to raw material precursors, to reduce calcination time and to suppress production of giant particles by using microwaves. A method for manufacturing abrasive particles for chemical mechanical polishing slurry comprises the steps of: (S100) preparing a raw material precursor; and (S110) calcining the raw material precursor by irradiating microwaves on the raw material precursor. A method for manufacturing chemical mechanical polishing slurry comprises the steps of: preparing abrasive particles; mixing the abrasive particles, solvent and dispersing agent to obtain a mixture; milling the mixture; filtering the milled mixture; and aging the filtered mixture.