DEVICE OF SHIELDING LOCAL PALSMA AND METHOD THEREOF

摘要

A device of shielding local plasma and method thereof is provided to solve problems including the particle formation and board contamination etc by using a cheap metal mesh and a high dielectric granule. A plasma shielding device(20) protects a electrode(13) from plasma. The plasma shielding device comprises a perpendicular shielding member(27) and a horizontal shielding member(21) formed in the horizontal plane edge of electrode. A predetermined space is formed in one of the horizontal and the perpendicular shielding member. The mesh(25) of a metal material is formed in a predetermined space. The insulating member(23) is laminated between the electrode and the perpendicular shielding member. The predetermined space is filled with the high dielectric granule. The material of a high dielectric granule is ceramics.