发明名称 |
A SEMICONDUCTOR TRANFERRING DEVICE AND TEST HANDLER USING THEREOF |
摘要 |
An apparatus for transferring a semiconductor device and a test handler are provided to easily return the semiconductor device to the test chamber by setting up the transfer apparatus between the loading system and the unloading apparatus. A plurality of customer trays are loaded in a loading system(10). A plurality of empty customer trays are loaded in an unloading apparatus(20). A transfer apparatus(30) is prepared between the loading system and the unloading apparatus. The transfer apparatus loads the semiconductor investigation from the loading system in the test tray. The transfer apparatus returns the semiconductor device in which the test is finished in the test tray to the unloading apparatus. |
申请公布号 |
KR20090073351(A) |
申请公布日期 |
2009.07.03 |
申请号 |
KR20070141270 |
申请日期 |
2007.12.31 |
申请人 |
MIRAE CORPORATION |
发明人 |
BEOM, HEE RAK;AN, JUNG UG |
分类号 |
G01R31/26;H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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