摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell with superior power generation efficiency at a low cost. <P>SOLUTION: The method for manufacturing a solar cell comprises: a step of forming a heavily-doped p-type impurity diffusion layer by diffusing a p-type impurity into at least part of a first surface serving as one side of a silicon substrate; and a step of etching the first surface of the silicon substrate or the first surface and a second surface, which is on the opposite side of the first surface, of the silicon substrate by using, as a mask, at least one of the heavily-doped p-type impurity diffusion layer and a film which is formed on the heavily-doped p-type impurity diffusion layer during the formation of the heavily-doped p-type impurity diffusion layer. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |