| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer capable of suppressing the generation of particles, by circumventing the situation where a solvent valorizes to turn into particles, while micro-mist flies in the inside of a vaporization chamber, and creating an environment where micro-mist can be surely vaporized, and to provide a structure of a film forming device equipped with the vaporizer. SOLUTION: This vaporizer 410 includes a spray means 411 for spraying a solution material prepared, by dissolving a material in a solvent; a vaporization chamber 412 having a heated vaporization surface for vaporizing the sprayed solution material; and a gas lead-out port 413 for leading out the material gas produced in the vaporization chamber. In the vaporizer, the vaporization surface located in the spray direction of the spray means is formed with a filter 414 having air permeability. COPYRIGHT: (C)2009,JPO&INPIT
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