| 摘要 |
PROBLEM TO BE SOLVED: To simplify the configuration of a measuring device; to heighten repeated measurement accuracy; to shorten a time required for measurement; and to heighten a throughput, when measuring a fine height such as a height caused by floating of an lead of an IC. SOLUTION: The shape of a lead tip part is expressed by a rectangular function, and Fourier transform of an intensity distribution of an image of the lead tip part expressed by convolution integration of the shape function and a point response function is determined. A relational expression between the intensity distribution in an image of the lead tip part and the height of the lead tip is determined from the Fourier transform, and the height caused by floating of the lead is determined from the expression. A device for performing analysis operation for determining the height is formed by adding an analysis software for performing the operation for determining the height as additional module to a two-dimensional inspection device comprising an existing photographing means and an image analysis software. COPYRIGHT: (C)2009,JPO&INPIT
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