| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply system and a gas supply method capable of restraining reduction in a gas supply speed. SOLUTION: A carbon dioxide supply part 33 has carbon dioxide cylinders 331a and 331b storing liquefied gas in a sealed inside space, hollow carbon dioxide manifolds 333a and 333b connected to these carbon dioxide cylinders 331a and 331b, a carbon dioxide supply pipe 332 and a lower pipe 212. The carbon dioxide manifolds 333a and 333b communicate with liquefied carbon dioxide stored in the carbon dioxide cylinders 331a and 331b, and the liquefied carbon dioxide is introduced from the carbon dioxide cylinders 331a and 331b. A carbon dioxide pressure reducing valve 335 reducing pressure of the liquefied carbon dioxide is arranged in the middle of the carbon dioxide supply pipe 332, and the liquefied carbon dioxide is vaporized by reducing pressure by the carbon dioxide pressure reducing valve 335. COPYRIGHT: (C)2009,JPO&INPIT
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