| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of inspecting always with a proper contact load, even when a probe card is thermally expanded in high-temperature inspection. SOLUTION: This inspection device 10 is equipped with a mounting table 11 capable of adjusting a temperature, a lifting driving mechanism 12, a probe card 13, and a control device 14. The lifting driving mechanism 12 is equipped with first and second driving shafts 123A, 123B connected through coupling members 125A, 125B to lift the mounting table 11, a stepping motor 124 for driving the driving shafts 123A, 123B, and a torque detection means 128 for detecting a torque between the first and second driving shafts 123A, 123B based on the contact load between a plurality of probes 13A and a device. The control device 14 has a torque controller 143 for controlling a torque to be a reference torque based on a torque signal from the torque detection means 128 when the probe card 13 is expanded due to temperature variation. COPYRIGHT: (C)2009,JPO&INPIT |
