| 摘要 |
PROBLEM TO BE SOLVED: To actualize good grinding work for an object to be ground by performing primary grinding with a grinding tape and secondary grinding with an abrasive material in sequence, namely, performing the primary grinding of the object with the grinding tape of a tape grinding mechanism and then using a grinding change-over mechanism for changing over the primary grinding into the secondary grinding of the object with the abrasive material of an abrasive material grinding mechanism. SOLUTION: This grinding device comprises a turntable 2 on which the plate-like object to be ground W can be placed, an object to be ground rotating mechanism for horizontally rotating the turntable, the tape grinding mechanism 3 for transferring the grinding tape T on the upper side of the turntable and grinding the object with the grinding tape, and the abrasive material grinding mechanism 12 for horizontally rotating the plate-like abrasive material on the upper side of the turntable and grinding the object with the abrasive material K. COPYRIGHT: (C)2009,JPO&INPIT |
