COATING FORMING APPARATUS AND COATING FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating forming apparatus where the throughput is not measured by the processing time of a vacuum drying apparatus even if the processing time of the vacuum drying apparatus becomes long, and to provide a coating manufacturing method. SOLUTION: The vacuum drying apparatus is arranged in the order of a first vacuum drying apparatus 30-1 and a second vacuum drying apparatus 30-2 in series; a standby/passage station 50 is arranged between a coating apparatus 20 and the first vacuum drying apparatus; an odd-numbered substrate is allowed to wait at the standby/passage station after coating and then is carried to the second vacuum drying apparatus; an even-numbered substrate is passed through the standby/passage station after coating and then is carried to the first vacuum drying apparatus; and both the substrates are subjected to vacuum drying processing simultaneously under the same conditions. COPYRIGHT: (C)2009,JPO&INPIT