| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical pulse multiplexing unit which simultaneously radiates a plurality points to be irradiated. SOLUTION: The optical pulse multiplexing unit has: a half mirror which demultiplexes incident light and generates transmitted light and reflected light; optical units which are oppositely disposed on both sides of the half mirror, respectively deflect the transmitted light and reflected light which are split by the half mirror, and multiplex again the light at a predetermined point on the half mirror; and an optical path length correction part which equalizes the optical paths on a predetermined plane, wherein the optical unit which is disposed on one side of the half mirror has an optical deflecting part which deflects the light split by the half mirror, and the optical deflecting part is arranged being tilted by a predetermined angle from a reference angle which is the arrangement angle of the optical deflecting part when the light deflected by the optical deflecting part is multiplexed again with the light from the optical unit arranged on the other side at the same incident angle at a common point on the half mirror. COPYRIGHT: (C)2009,JPO&INPIT
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