| 摘要 |
A probe card (105') adapted for testing at least one integrated circuit integrated on corresponding at least one die (145) of a semiconductor material wafer, the probe card including a board (125') adapted for the coupling to a tester apparatus, and a plurality of probes (225) coupled to the said board, wherein the probe card comprises a plurality of replaceable elementary units (135'), each one comprising at least one of said probes for contacting externally-accessible terminals of an integrated circuit under test (145), the plurality of replaceable elementary units being arranged so as to correspond to an arrangement of at least one die on the semiconductor material wafer containing integrated circuits to be tested. |
