| 摘要 |
A proximity pin of a substrate processing apparatus is provided to simply control a contact position with a substrate by fitting a proximity pin to various cutting pattern. A proximity pin(100) comprises a body part, a hinge part, and a fixing contact part. The body part(110) has an extended length upward and downward. The hinge part(120) is coupled in a bottom part of the body part in order to downwardly move a top end part of the body part by rotation. The fixing contact part(130) is coupled in a bottom part of the hinge part, and includes a contact surface capable of being stably fixed on a plate. The body part has a length longer than thickness of a robot arm which transfers a substrate to a top side of the body part. The hinge part comprises a fixture(121) coupled in the fixing contact part, a hinge axis(122), a vertical supporting surface(123), and a horizontal supporting surface(124).
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