发明名称 SEMICONDUCTOR DEVICE WITH FUSE AND METHOD FOR FABRICATING THE SAME
摘要 A method for fabricating a semiconductor with a fuse includes providing a substrate, forming an insulation layer over the substrate, forming a polysilicon hard mask to form a metal contact over the insulation layer, forming a first mask pattern to form a fuse over the polysilicon hard mask, and removing the polysilicon hard mask exposed by the first hard mask pattern to form a polysilicon fuse connected to a portion of the polysilicon hard mask.
申请公布号 US2009166802(A1) 申请公布日期 2009.07.02
申请号 US20080163369 申请日期 2008.06.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM BUEM-SUCK
分类号 H01L23/525;H01L21/44 主分类号 H01L23/525
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