TCP HANDLING DEVICE, AND METHOD FOR POSITIONAL ALIGNMENT OF CONNECTING TERMINALS IN THE DEVICE

摘要

A test pad of a tested TCP is photographed by a second camera (6b) so that its coordinate data is acquired. The coordinate data of characteristic portions (84) disposed in a probe card (8) is acquired in relation to the positional information of the contact faces of probes (81) of the probe card (8). The positional information of the contact faces of the probes (81) is estimated from the coordinate data of the characteristic portions (84). The positional displacements between the test pad and the probes (81) are determined from the acquired coordinate data of the test pads and the estimated positional information of the contact faces of the probes (81). The probe card (8) is moved by a probe card stage (7) on the basis of the positional displacements so that the probes (81) are automatically positioned with respect to the test pads of the tested TCP. As a result, the test pads of the TCP and the probes (81) of the probe card (8) can be positioned extremely precisely.