| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflection preventing film which is a monolayer or a multilayer reflection preventing film coated on an optical device or the like, has a fine irregular structure on the surface of the outermost layer consisting essentially of alumina, and has a reflectance which is not largely varied by such an environmental change as temperature change. <P>SOLUTION: Both in the monolayer reflection preventing film, which is consisted essentially of alumina and has the fine irregular structure on the surface, and in the multilayer reflection preventing film, having at least one layer of nonorganic material layer or an organic material layer inserted between such an alumina layer having the fine irregular structure and a base material, the membrane stress of the overall reflection preventing film is limited to 100 MPa or smaller. <P>COPYRIGHT: (C)2009,JPO&INPIT |
