摘要 |
PROBLEM TO BE SOLVED: To provide a resistor circuit formed of polycrystalline silicon resistors which are stable because of small resistance value variation, have high output voltage accuracy and suppress the influence of plasma charges, heat and stress, etc., relating to a semiconductor manufacturing process. SOLUTION: In the semiconductor device, a metal electrode is disposed on each of a plurality of resistor groups which are made of the polycrystalline silicon resistors and constitute the resistor circuit. The metal electrode is connected to an end of the resistor via another interconnecting layer. Accordingly, the external influence which the metal electrode receives during a semiconductor process is prevented from directly acting on the resistor, thereby resistance variations are suppressed. COPYRIGHT: (C)2009,JPO&INPIT
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