| 摘要 |
A dual vacuum pump system is provided to increase the pumping speed and the service life by connecting a plurality of dry pumps to a booster pump in a row. A dual vacuum pump system comprises: a booster pump(110) connected to the processing chamber; and at least two dry pumps(120) connected to the booster pump in a row. The pumping speed of the booster pump is greater than the pumping speed of the dry pump. The dry pump includes: a first dry pump(121) connected to the booster pump; and a second dry pump(122) connected to the booster pump and the first dry pump. The first dry pump and the second dry pump have the identical pumping speed. |
