发明名称 |
NOZZLE STRUCTURE OF SLIT COATER |
摘要 |
<p>A nozzle structure of a high speed slit coater is provided to produce a coating product of stable and uniform quality and to minimize air resistance by removing a particle remaining on a surface of a substrate by a windbreak. A slit nozzle(100) forms a cavity(130) at a space in which a chemical solution is received between a pair of plate bodies(110,120). An outlet(150) having a gap(140) of a slit type for exhausting the chemical solution is positioned in a bottom end of the cavity. A pair of plate bodies forms an upward tilt surface(111) toward an outer side of the outlet. One of a pair of plate bodies integrally forms a windbreak(160) from the upward tilt surface to a downward tilt direction. A space part(170) is positioned between the windbreak and the outlet. A bottom part of the space part is wider than a top part of the space part.</p> |
申请公布号 |
KR20090072360(A) |
申请公布日期 |
2009.07.02 |
申请号 |
KR20070140449 |
申请日期 |
2007.12.28 |
申请人 |
K.C.TECH CO., LTD. |
发明人 |
JANG, JONG HWAN;KIM, JONG KIL |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|