| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum arc vapor-deposition apparatus which has solved a problem that a cathode and a trigger electrode are short-circuited due to a metal substance that is produced when a vapor-deposition material composing the cathode is melted and the apparatus becomes unusable, and which can thereby extend a period in which the apparatus can be used in a state of requiring no maintenance to a longer period of time. <P>SOLUTION: A unit body is formed of the cathode 1 made from the vapor-deposition material, an insulator 4 which surrounds the perimeter of the cathode 1, and the trigger electrode 2 which is installed on the perimeter of the insulator 4. The vacuum arc vapor-deposition apparatus 100 has an arc vapor-deposition source 10 formed of a vacuum tube 8 which accommodates a cylindrical anode 6 therein that accommodates the unit body. One end 1' of the cathode 1 protrudes from the end part 4' of the insulator 4. Creepage discharge occurs between a side face 1" of the protruding cathode 1 and one end 2' of the trigger electrode 2, and an insulating member 3 is provided on the end 2' of the trigger electrode 2. <P>COPYRIGHT: (C)2009,JPO&INPIT |
