发明名称 |
METHOD FOR MANUFACTURING DIAMOND MONOCRYSTAL HAVING A THIN FILM, AND DIAMOND MONOCRYSTAL HAVING A THIN FILM |
摘要 |
A method for growing a low-resistance phosphorus-doped epitaxial thin film having a specific resistance of 300 Omegacm or less at 300 K on a principal surface of a {111} monocrystal substrate under conditions in which the phosphorus atom/carbon atom ratio is 3% or higher, includes the principal surface having an off-angle of 0.50° or greater. The diamond monocrystal having a low-resistance phosphorus-doped diamond epitaxial thin film is such that the thin-film surface has an off-angle of 0.50° or greater with respect to the {111} plane, and the specific resistance of the low-resistance phosphorus-doped diamond epitaxial thin film is 300 Omegacm or less at 300 K.
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申请公布号 |
US2009169814(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
US20070282137 |
申请日期 |
2007.12.26 |
申请人 |
UEDA AKIHIKO;MEGURO KIICHI;YAMAMOTO YOSHIYUKI;NISHIBAYASHI YOSHIKI;IMAI TAKAHIRO |
发明人 |
UEDA AKIHIKO;MEGURO KIICHI;YAMAMOTO YOSHIYUKI;NISHIBAYASHI YOSHIKI;IMAI TAKAHIRO |
分类号 |
C30B23/00;B32B5/00;B32B9/00;H01L21/322 |
主分类号 |
C30B23/00 |
代理机构 |
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地址 |
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