DIAPHRAGM PRESSURE MEASURING CELL ARRANGEMENT

摘要

A diaphragm pressure-measuring cell arrangement contains a housing body (2) made at least partially of sapphire and a sapphire diaphragm (6) with a peripheral edge region which is connected to the housing body (2) using a first seal (8) in order to form a reference vacuum chamber (5). An outer surface of the diaphragm (6) is exposed to a medium to be measured. A ceramic support body (1) is arranged on the rear side of the housing body (2) using glass solder and has an overhanging surface which surrounds the housing body (2) and forms a first sealing surface. A tubular measuring cell housing (19) accommodates the measuring cell mounted on the ceramic support body (2), wherein the inside of the measuring cell housing (19) has a surrounding sealing surface (35) which corresponds to the first sealing surface. A metal ring seal (18) is arranged between the sealing surfaces, wherein pressing means (20) are provided for the purpose of pressing the sealing surfaces together.