OPTICAL CHARACTERISTIC MEASURING INSTRUMENT AND OPTICAL CHARACTERISTIC MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical characteristic measuring instrument accurately measuring the highly precise optical characteristic value of a measuring sample even in the case where the measuring sample is measured in an inclined abnormal posture state because the measuring sample is not flat or has a curved surface. SOLUTION: The optical characteristic measuring instrument 1 is equipped with: a light source part 11 for irradiating the measuring sample SM with light; a light receiving part 21 having a plurality of light receiving elements for receiving the reflected light from the measuring sample SM irradiated with the light emitted from a light irradiation part; an optical characteristic operation part for leading out optical characteristics on the basis of the output of the light receiving part 21; and an angler detection part for detecting the angleθ2 formed by the surface of the measuring sample SM and the reflected light. The optical characteristic operation part leads out the optical characteristic corrected on the basis of the angle detected by the angle detection part and Fresnel reflection characteristics. COPYRIGHT: (C)2009,JPO&INPIT