| 摘要 |
PROBLEM TO BE SOLVED: To properly control a setting temperature of a prober to a desired temperature by detecting ice clogging of an ice filter device at an early stage to solve it, in regard to a cooling system preventing ice clogging of an apparatus such as a flow regulating valve due to ice deposited from a refrigerant. SOLUTION: The cooling system has a chuck P connected to a refrigerant passage for holding an object to be subjected to temperature control, the flow regulating valve carrying out flow regulation of the refrigerant 24 cooled by a refrigerator 22, the ice filter device 50 removing ice produced in the refrigerator 22 from ice, and a temperature sensor 30a detecting a chuck temperature of the chuck P. After passage of a determination start time, a determination value based on a reference valve opening value being a normal valve opening of the flow regulating valve 28 after passage of the determination start time is compared with a flow regulating valve command value to the flow regulating valve 28 calculated from a state of a present cooling system, and when it is judged that the flow regulating valve command value is larger than the determination value, a regeneration process for an ice clogging prevention device 50 is started. COPYRIGHT: (C)2009,JPO&INPIT
|
